Application of Langmuir probe and optical emission spectroscopy for bromofluorocarbon plasma diagnostics
نویسندگان
چکیده
منابع مشابه
Optical emission spectroscopy and Langmuir probe diagnostics of CH3F/O2 inductively coupled plasmas
A CH3F:O2 (50%:50%) inductively coupled discharge, sustained in a compact plasma reactor, was investigated as a function of power (20–400 W) and pressure (9–30 mTorr), using optical emission spectroscopy and Langmuir probe measurements. The electron density increased linearly with power but only weakly with pressure. The effective electron temperature was nearly independent of power and pressur...
متن کاملCharacterization of transformer coupled oxygen plasmas by trace rare gases–optical emission spectroscopy and Langmuir probe analysis
Trace rare gases–optical emission spectroscopy (TRG–OES) and Langmuir probe analysis have been used to measure the electron temperature, Te, in a high-density inductively (transformer) coupled (TCP) 10 mTorr oxygen plasma as a function of the 13.56 MHz radio frequency (rf) power. The oxygen atomic densities were estimated by O-atom optical emission (8446 Å), and rare gas actinometry (Ar, 7504 Å...
متن کاملDiagnostics of Organic Compounds by Optical Emission Spectroscopy
This work is focused on the optical emission spectroscopy observations of the DC non-pulsed diaphragm discharge in various water solutions of selected organic dyes (Direct Blue 106 and Solvent Yellow 94), a mixture of humic acids and alkaline metals. The emission intensity dependencies of hydrogen and oxygen spectral lines on initial conductivity are studied and compared also with respect to th...
متن کاملDiagnostics of Organic Compounds Degradation by Optical Emission Spectroscopy
This contribution is focused on the optical emission spectroscopy observations of the DC non-pulsed diaphragm discharge in various water solutions. The emission intensities of the hydroxyl radicals and the atomic lines of some selected elements are investigated. We have also studied the influence of the experimental conditions (for example of the applied high voltage and the discharge power, pH...
متن کاملMeasurement of electron temperatures of Argon Plasmas in a High-Density Inductively-Coupled Remote Plasma System by Langmuir Probe and Optical-Emission Spectroscopy
We measured electron density and electron energy distribution function (EEDF) in our reactor by a Langmuir probe. The EEDF of Ar plasma in the reactor could largely be described by the Maxwell-Boltzmann distribution function, but it also contained a fraction (~10) of electrons which were much faster (20-40 eV). The peak of the fast-electron tail shifted from E ~ 35 eV at 11 μbar to E ~ 25 eV wh...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2021
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/1870/1/012006